Carbon Tetrafluoride
Also known as: F14
Tetrafluoromethane, also known as carbon tetrafluoride, is colorless, tasteless and odorless. Insoluble in water, 0.0015 at 25 ℃ under normal pressure, soluble in chloroform and benzene. This product is non-toxic and non combustible. High concentration has anesthetic effect. The high-purity gas and its mixture with high-purity oxygen are the most widely used plasma etching gas in microelectronics industry, and can also be used as low-temperature refrigerant and insulation medium. It is inert to many reagents and does not hydrolyze at 1000 ℃. It does not react with copper, nickel and tungsten at room temperature. Because of the strong chemical stability of the C-F bond, the perfluorocarbons represented by CF4 can be considered to be basically nontoxic.
| Payment & Shipping Terms | Supply Capacity | ||
|---|---|---|---|
| Payment Terms: | T/T, WU | Production Capacity: | 800T/year |
| Min. Order: | 1FCL | Packing: | according to the customer's requirements |
| Means of Transport: | Ocean, Air, Land | Delivery Date: | 7 days |
Carbon Tetrafluoride
CAS 75-73-0
Tetrafluoromethane, also known as carbon tetrafluoride, is colorless, tasteless and odorless. Insoluble in water, 0.0015 at 25 ℃ under normal pressure, soluble in chloroform and benzene. This product is non-toxic and non combustible. High concentration has anesthetic effect. The high-purity gas and its mixture with high-purity oxygen are the most widely used plasma etching gas in microelectronics industry, and can also be used as low-temperature refrigerant and insulation medium. It is inert to many reagents and does not hydrolyze at 1000 ℃. It does not react with copper, nickel and tungsten at room temperature. Because of the strong chemical stability of the C-F bond, the perfluorocarbons represented by CF4 can be considered to be basically nontoxic.
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| CAS Number | 75-73-0 |
|---|---|
| Molecular Formula | CF4 |
| Molecular Weight | 88 |
| Place of Origin | Zhejiang,China (Mainland) |


